EB POWER SUPPLY HPS SERIES
The HPS series are power supply for electron beam-evaporation that supply electricity of 5/10/16kW at the maximum, and aim at more stable evaporation. By adopting a solid-state style,we could realize downsizing,lightweighting and high reliability.
Features
- These are no water concerns due to forced air-cooling in use.
- No regular separate parts like vaccum tube.
- Fixed current drop method is used to minimize film depositionrate reductions during abnormal discharges(arcing).
- It is possible to stably control electricity due to the feedback control of emission.
- Each circuit has been refined and improvements have been made for higher reliability and operational stability.
Applications
- Vaccum evaporation
- Ion plating