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Spin Chucks
OPTIMUM SELECTION FOR PERFECT COATING RESULTS
The spin chuck range by SAWATEC offers an optimum selection for all substrate sizes and materials to switch seamlessly from one spin chuck size and design to the next. To ensure that the reverse side of the substrate does not become contaminated, it is crucial to select the optimum spin chuck size and specific chuck design.
Replacing the spin chucks is very easy and does not require any tools. Depending on the application, one-piece or two-piece, vacuum or mechanical spin chucks with optical centring aid are used.
TWO-PIECE SPIN CHUCK
SAWATEC developed an innovative two-piece spin chuck which offers great benefits. The new design reduces effectively costs for the capability of handling multiple substrate dimensions. The chuck holder made in Aluminium can be combined with a wide range of different plastic spin chucks. Less space is required to store a full set of different chuck sizes which is essential for work conditions where the space to operate is very limited (especially in Gloveboxes and other Cabinet applications).
SM-150/HP-150
Spin chuck set
| Based on commonly used spin chuck sizes SAWATEC created a Spin Chuck Set, which contains different spin chuck sizes starting from specimen 8“, 1“, 2“, 4“, and 6“ vacuum chucks.The chuck holder is an integrated part of the Spin Module SM-150. The Spin Chuck Set is designed for our Spin Module SM-150 but can principally also be used for larger instruments. |
- Reduced cost for the capability of handling multiple substrate dimensions
- Faster switching between substrates of different sizes
- No tools required for installation
- Compatible with all SAWATEC Spin Modules
For more details or the documentation please contact our Sales Team via contact form
Bowl Protector
The SAWATEC Spin Modules are the optimal choice for manual or semi-automatic coating of thin layers. The cleanliness of the process chamber is very important to achieve good coating results. It is therefore advisable to clean the spin coater immediately after each use (cleaning instructions in accordance with the operating instructions). There are some places, which are often too little considered or need a little more cleaning effort (e. g., suction and media discharge in the process bowl, chuck receptacle, lid).
In order to keep the cleaning effort for the process chamber to a minimum, SAWATEC has developed a good value bowl protection insert. This bowl protection insert is easy to remove and dispose of once the process has been completed.
Advantages
- Cost-effective and process-optimised solution
- Perfect shape accurate fit in the process bowl
- Significantly less contamination of the process chamber
- Considerably shorter cleaning time
- Simple replacement of the used bowl protection insert (disposable item)
FEATURES (BASIC CONFIGURATION)
Often individual substrates or only small series are produced for R & D orders. Usually, the spin coater is only minimally soiled. For these applications, the spin coater can be cleaned in a very short time using the bowl protection insert and made ready for use again for the next job.
The spin module is of course also used for serial production. Production companies that work primarily with low-viscosity photoresists usually use the media discharge in the process bowl,i. e. the spun-off photoresist is discharged via media discharge into a disposal canister. For this purpose, a small hole is made in the bowl protection insert above the media outlet so that the photoresist flows off as directly as possible and the process bowl is hardly soiled.
Production companies that work with higher-viscosity photoresists or change them more frequently usually use the bowl protection inserts for their processes. One box contains 100 stacked bowl protection inserts, ensuring trouble-free production over a long period of time. The spin module is usually only cleaned after production is finished or when the photoresist needs to be changed.
Dosing Pumps
Precision Dosing Pumps
The dosing pumps by SAWATEC feature a wide range of media viscosities, coupled with a high-precision delivery volume.
The application of hard-wearing, inert materials results in an excellent chemical compatibility with the most diverse fluids. Due to the compact, space-saving design, easy flushing and cleaning, long lifetime and low-cost maintenance, the pumps are not only used in our own instruments and systems, but also preferentially by a variety of OEM customers.
The different dosing pumps can be used for a wide range of applications and are ideally suited for use in the semiconductor industry, in the field of MEMS, in medical technology, in the chemical/pharmaceutical industry, in bottling plants and in analytical and laboratory apparatus.
SP-177
SPV-15
FP-20
GSP-98-ML
GSP-98
Diaphragm dosing pumps SP-177
The diaphragm dosing pumps SP-177, SPV-15 and SP-50, as well as the diaphragm supply pump FP-20 are perfectly suited for applications with highly fluid and viscous media and are also approved for explosion-proof processes. All types have a robust design, are low maintenance and very reliable. Thanks to these properties, they are a good choice for flexible applications.
- Dosing amount: 0.1 … 12 ml (± 0.1 ml, timer dependent)
- Viscosity: 10 … 800 cps
- Medium pressure created by the pump: < 0.2 bar (depending on tube length and viscosity)
- Maximum flow of the medium: 4 ml/sec (depending on tube length and viscosity)
- Pump controller: Vacuum: -0.4 …-0.8 bar / Compressed air: 0.5 … 5 bar (tube Ø 6/4 mm)
Diaphragm dosing pumps SPV-15
The diaphragm dosing pumps SP-177, SPV-15 and SP-50, as well as the diaphragm supply pump FP-20 are perfectly suited for applications with highly fluid and viscous media and are also approved for explosion-proof processes. All types have a robust design, are low maintenance and very reliable. Thanks to these properties, they are a good choice for flexible applications.
- Dosing amount: 0,1 … 15 ml (± 0,1 ml, timer dependent)
- Viscosity: 10 … 10’000 cps
- Medium pressure created by the pump: max. 5 bar (depending on tube length and viscosity)
- Maximum flow of the medium: 4 ml/sec (depending on tube length and viscosity)
- Pump controller: Vacuum: -0.4 …-0.8 bar / Compressed air: 0.5 … 5 bar (tube Ø 6/4 mm)
Diaphragm dosing pumps SPV-50
The diaphragm dosing pumps SP-177, SPV-15 and SP-50, as well as the diaphragm supply pump FP-20 are perfectly suited for applications with highly fluid and viscous media and are also approved for explosion-proof processes. All types have a robust design, are low maintenance and very reliable. Thanks to these properties, they are a good choice for flexible applications.
- Dosing amount: 0.1 … 50 ml (± 0.1 ml, timer dependent)
- Viscosity: 10 … 800 cps
- Medium pressure created by the pump: < 0.2 bar (depending on tube length and viscosity)
- Maximum flow of the medium: 50 ml/sec (depending on tube length and viscosity)
- Pump controller: Vacuum: -0.4 …-0.8 bar / Compressed air: 0.5 … 5 bar (tube Ø 6/4 mm)
Diaphragm supply pump FP-20
The diaphragm dosing pumps SP-177, SPV-15 and SP-50, as well as the diaphragm supply pump FP-20 are perfectly suited for applications with highly fluid and viscous media and are also approved for explosion-proof processes. All types have a robust design, are low maintenance and very reliable. Thanks to these properties, they are a good choice for flexible applications.
- Dosing amount: 0,1 … 20 ml (± 0,1 ml, timer dependent)
- Viscosity: 10 … 800 cps
- Medium pressure created by the pump: < 0.2 bar (depending on tube length and viscosity)
- Maximum flow of the medium: 20 ml/sec (depending on tube length and viscosity)
- Pump controller: Vacuum: -0,4 … -0,8 bar / Compressed air: 0,5 … 5 bar (tube Ø 6/4 mm)
Diaphragm supply pump FP-98-ML
The precision pumps GSP-98-ML and GSP-98 are ideal for applications requiring high-precision dosing amounts. Due to their innovative design with integrated valve control, these pumps do not require any additional external valves. The medium is not stressed because it does not control the pump. Therefore, no gas bubbles form.
GSP-98-ML
- Dosing amount: 0,01 … 2 ml (± 0.004 ml)
- Viscosity: 10 … 500 cps
- Medium pressure created by the pump: < 0.2 bar (depending on tube length and viscosity)
- Maximum flow of the medium: 2 ml/sec (depending on tube length and viscosity)
- Stepper motor torque: 0.6 Nm
- Pump controller: Compressed air: 4 bar (+ 0.5 bar)
PUMP CONTROLLER GSP II
- Features: Dosing, flushing, cleaning
- 10 freely definable dosing and cleaning programmes
- User interface via membrane keys with two-line display
- Process parameters: Dosing, reverse, offset and suck back time
- Controller controls the stepper motor and the magnetic valve
- Sensor checks the initial position of the needle valve
- Equipped with RS232 and digital I/O interface
- Easy system integration
Diaphragm supply pump FP-98
The precision pumps GSP-98-ML and GSP-98 are ideal for applications requiring high-precision dosing amounts. Due to their innovative design with integrated valve control, these pumps do not require any additional external valves. The medium is not stressed because it does not control the pump. Therefore, no gas bubbles form.
GSP-98
- Dosing amount: 0,02 … 5 ml (± 0.01 ml)
- Viscosity: 10 … 3000 cps
- Medium pressure created by the pump: < 0.2 bar (depending on tube length and viscosity)
- Maximum flow of the medium: 4 ml/sec (depending on tube length and viscosity)
- Stepper motor torque: 0.6 Nm
- Pump controller: Vacuum 4 bar (+ 0.5 bar)
PUMP CONTROLLER GSP II
- Features: Dosing, flushing, cleaning
- 10 freely definable dosing and cleaning programmes
- User interface via membrane keys with two-line display
- Process parameters: Dosing, reverse, offset and suck back time
- Controller controls the stepper motor and the magnetic valve
- Sensor checks the initial position of the needle valve
- Equipped with RS232 and digital I/O interface
- Easy system integration
Dosing Valve
The diaphragm dosing valve DV-257rounder among the diaphragm dosing valves. It is perfectly suited for any type of media with low to medium viscosity and explosion-proof processes.
In addition, SAWATEC‘s product range includes further application-based valves.
A wide viscosity range, coupled with space-saving designs, a long life cycle thanks to hard-wearing materials, very easy cleaning and inexpensive maintenance distinguish all SAWATEC dosing valves.
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