Rapid Thermal Processing
- Crystal annealing of ferroelectric thin films.
- Diffusion annealing, oxide film deposition annealing after ion implantation.
- Sintering, alloying treatment of Si and compound wafers.
- Glass substrate uniform temperature annealing.
- Thermal cycle, thermal shock, thermal fatigue testing.
- Temperature programmed desorption testing, catalytic effect testing.
- 50°C/s high speed heating.
- Select the desired atmosphere from vacuum, gas, gas flow, air.
- Precise temperature control.
- Compact, table-top design.
Seebeck Coefficient
ZEM-3 MODELS, SEEBECK COEFFICIENT / ELECTRIC RESISTANCE MEASURING SYSTEM
The ZEM-3 models are systems that collect easy-to-use high precision measuring technologies based on the requests of domestic and international academic societies and our customers. Conforms to JIS standards for Seebeck coefficient measuring systems for thermoelectric materials. Thermoelectric power JIS R 1650-1 Electric resistance JIS R 1650-2
Applications
- Thermoelectric characteristics evaluation of a wide range of materials such as semiconductors, ceramics, and metals.
Features
- Employs an Infrared Gold Image Heating Furnace with excellent temperature controllability and a microheater for temperature difference control. Measurements are computer controlled and performed per temperature difference at the specified temperatures which eliminates dark electromotive force and allows automatic measurements. Ohmic contact auto check function (V-I plot) is standard equipment.
Rapid Heating & Cooling IR Furnaces
QHC SERIES, HIGH TEMPERATURE INFRARED LAMP HEATING SYSTEM
Table top RTA systems useful for process development in the fields of solar cell, compound semiconductor, and general laboratory heat treating work. Combining an Infrared Gold Image Furnace and temperature controller, the QHC series is a compact high speed heating/cooling system equipped with a quartz heat treatment chamber.
APPLICATIONS
- Solar cell substrate heat treatment
- Heat treatment in a hydrogen atmosphere
- Atmospheric annealing for basic research/heat treatment simulator for various materials
- Gas quenching heat treatment
- Thermal cycle and thermal shock testing
- Investigating semiconductor baking, annealing conditions
- 2-inch wafer research annealing
- Heat treatment of ceramics in an oxygen controlled atmosphere
FEATURES
- Wide condition settings from high speed heating to low speed heating
- Multi-step cyclic heating
Rapid Heating & Cooling IR Furnaces
VHC SERIES, VARIABLE ATMOSPHERE RAPID HEATING/COOLING SYSTEM
Table top RTA systems useful for process development in the fields of solar cell, compound semiconductor, and general laboratory heat treating work. Combining an Infrared Gold Image Furnace and temperature controller. The VHC series adds a vacuum pumping system and Pirani gauge to the features of the QHC series and data can be easily managed. Both VHC and QHC systems are customizable to your needs.
APPLICATIONS
- Solar cell substrate heat treatment
- Heat treatment in a hydrogen atmosphere
- Atmospheric annealing for basic research/heat treatment simulator for various materials
- Gas quenching heat treatment
- Thermal cycle and thermal shock testing
- Investigating semiconductor baking, annealing conditions
- 2-inch wafer research annealing
- Heat treatment of ceramics in an oxygen controlled atmosphere
FEATURES
- Wide condition settings from high speed heating to low speed heating
- Multi-step cyclic heating
- High speed gas quenching and cooling control with the gas cooling mechanism
- Easy data management with a PC
Rapid Heating & Cooling IR Furnaces
SSA-SERIES SIMPLIFIED INFRARED LAMP HEATING SYSTEM
A low-cost RTA system for small lab samples. This table top IR Furnace system is built up from a collection of stand-alone components including IR Furnace, quartz protective sample chamber, sample holder and temperature controller.
FEATURES
- Gas flow type or vacuum type quartz chamber selectable for the sample atmosphere. (Standard specification is the gas flow type) Optionally, both the gas flow type and vacuum type can be combined.
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