Turbo Molecular Pumps

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EXT Turbomolecular Pumps

The EXT Compound Turbo molecular Pumps has the combined certified technology of the ceramic mechanic lower bearing, the Holweck drag stage, a dry lasting magnetic upper bearing and a bonus on-board controller and a 24V d.c motor that adds to the convenience. Overall it requires minimal maintenance on high critical fore line pressure processes with oil and vibration free operation. It’s highly reliable, providing ultra-high vacuum with hydrocarbon-free functioning.

Compact Design : Optimum Performance for Efficient Systemization
Reliable : Lasting magnetic upper bearing and oil lubricated bottom bearing for trouble-free operation
Compatible with Edwards TAG and TIC Turbo Instrument Controller : Add up to 3 Vacuum Gauges Without the Need of an Additional Gauge Controller
RoHS Compliant : CSA/ULC Approved

Applications

Mass spectrometry
Electron microscopy
Research and development
High energy physics
Industrial
Efficient systematization due to high performance from compact design
Lasting magnetic upper bearing and oil lubricated bottom bearing for reliable running
Due to its compatibility with the Edwards TAG and TIC turbo and instrument controller, you can add up to 3 vacuum gushed without the need of an additional gauge controller.
RoHS compliant and CSA/UL approved

nEXT Turbomolecular Pumps

The front-runner amongst the world’s vacuum technology, Edwards, brings forth it’s highly reliable benchmark for scientific turbomolecular pumps with optimum performance and serviceability- the nEXT range of turbomolecular pumps that claim to be an ideal partner for analytical, high energy physics, R&D and UHV applications.

The nEXT range of turbomolecular pumps combine features and all the latest advances in its technology to provide a class leading product with end-user serviceability. The pump sizes available offer true 240, 300 and 400 litres per second pumping speed performance (N2).

The pumping speed performance received from the various sizes offer 240, 300 and 400 litres per second.

State-of-the-art rotor design to deliver extraordinary pumping speeds and compression ratios
Field proven reliability in the most challenging environments with over 200,000 turbomolecular pumps installed
Standard fit in many of the leading analytical instruments and designed with high energy physics, R&D and UHV in mind

Developed by keeping in mind high energy physics, R&D and UHV making it an ideal fit for leading analytical instruments.

Completely end user serviceable in minimum time without complex tooling or major disassembly

Traditional turbomolecular pump rotors either delivered high speed or high compression. The nEXT rotor on the other hand, eliminates that compromise through its re-designed blade arrangements for exceptional pump performance for a pump it’s size and achieve both higher speeds and compression.

Edwards is the leading producer of turbomolecular pumps in the world. Our industry standard STP pumps for magnetically levitated turbomolecular pumps are the most demanded in the challenging semiconductor applications. The EXT and nEXT are at an equal level of demand and have become an industry standard in many of the analytical instruments and R&D establishments over the last 20 years, making it close to 200,000 pumps in the field.

Our solid reputation for our turbomolecular pumps in the field of analytical manufacturers in the world has been quite rewarding. When you buy an Edwards nEXT turbomolecular pump, reliability is guaranteed, based on field proven technology and also user serviceability in just minutes!

In a traditional turbomolecular pump, there is an increase in vibration levels because the bearing is supported axially and radially by damping elastomers that eventually damp the rotor vibration.

Whereas, in the Edwards nEXT turbomolecular pump, there are lower vibration levels for the lifetime of the pump. This is due to the lower bearing being hard mounted into a special suspension system that eliminates damping elastomers. This special suspension system is intended to be stuff in the axial direction that ensures precise rotor positioning, but also more compliant radially that eventually absorbs vibration.

The end user serviceability is facilitated while changing the pump bearing because it does not require to be re-balanced and can be done without the use of complex tooling, jigs, fixtures or major disassembly.

Low cost of ownership – user serviceability
Reduced time – no customs paperwork or health & safety forms to complete
Increased up time – no shipping product for service

Flexibility and customization are the main features kept in mind while developing the nEXT range of pumps. This has helped us to cater to the growing needs and challenges faced for various applications, by utilizing the extensive knowledge we have in the field and providing tailored solutions. Splitfow variants are also available to suite a larger array of uses.

The nEXT range of pumps facilitate a rapid development in customization with minimum design and delivery time and maximum performance, providing an ultimate compact product for a certain application using its off the shelf “starting” components. nEXT turbomolecular pumps available with either an ISO100/160 or a CF100/160 inlet flange and has a N2 pumping speeds from 240 to 400 ls-1. The pumps are an integration of the proven bearing technology, dry permanent magnetic upper bearing, oil lubricated ceramic lower bearing with a better rotor design and a new molecular drag stage to provide new and improved pumping speeds and compression ratios. These pumps ensure complete user serviceability. They include 24 to 48 V DC sensor less motors that have a built-in drive fully compatible with our controllers – TAG and TIC. The pumps are available pre-set for either 80 or 160 W maximum power. The 80 W enables use with our 100 W TIC controllers are suggested for pumping Argon, but with a longer ramp time to full operating speed.

With a longer ramp time to complete operating speed, the 80 W enables use with our 100 W TIC controllers are and suggested for pumping Argon.

STP Maglev Turbomolecular Vacuum Pumps

For a consistent, reliable performance and zero maintenance, you can rely on Edwards STP Maglev Turbomolecular Pumps to deliver every time. These are the primary option for applications that require high up-time, hydrocarbon-free pumping, minimal maintenance and reduced vibration. These are the sought-out option for applications that require reduced maintenance and vibration, hydrocarbon-free pumping and high up-time.

There is no contact between the rotor and the pump because it is entirely suspended using magnetic bearings. This not only reduces the vibration levels but also reduces level of maintenance because there isn’t any contact with the bearing when the rotor is rotated. An energy saving protocol has also been included in each design so as to ensure efficiency in power consumption without a compromise on quality or performance of the pump. The first STP Maglev Turbomolecular Pump was sold in 1983, and currently world-wide we have over 130,000 installations from which 85% run on semiconductor process tools where they show incredible levels of operation.

Increased Productivity:
Compact Size:
Low Cost of Ownership:
Maintenance Free:

Flat Panel Display

STP Maglev Turbomolecular Pumps are available in an extensive range designed to ensure utmost substrate throughout and an optimum zero humidity process condition along with reducing power, footprint and weight.

LED

STP Maglev Turbomolecular Pump is the ultimate compact package that operates at low power for larger volume, high-flow applications.

Photovoltaic

The STP Maglev Turbomolecular Pumps are highly customized to specific applications with commendable process gas handling, stability in performance and optimum reliability.

Semiconductor Processing

The STP Maglev Turbomolecular Pumps are a definitive choice for your pump needs because of its entirely magnetically-levitated rotor that reduces the risk of contamination to the pump and therefore reduces the need for service.

Advanced High Throughput Series

The next generation of semiconductor etch and CVD processes require high levels of substrate throughput, and the STP Maglev Turbomolecular Pumps’ magnetically-levitated “advantage” series provide just that. They have been developed to a continuous series of advanced improvement techniques from the H series of products to ensure high performance and reliability. It can be considered as the next generation of a high throughput turbo pump, owing to the fact that it’s improved rotor technology and 3D blade design with a combination of the best materials has allowed its creation inside the same footprint as many of its existing variants. 300 l/s to 4500 l/s is the throughput speeds within which pumps in this range are available, where there is an increased performance in H2, N2 and Ar for throughput upto 6 slm.

Fully Integrated Controller & Power Supply

These pumps are an ultimate all-in-one solution to all your pump needs. It’s fully integrated controller helps to reduce the footprint and save considerable amounts on real estate as well as installation cost and time. There is a 32% reduction in the energy consumption at high gas flows due to the presence of a small power supply present in the on-board controller. It operates at throughput speeds from 300 l/s to 4500 l/s which makes it ideal for many operations and applications.

Ultra-High Vacuum

The Ultra High Vacuum series of magnetically levitated turbomolecular pumps provide unparalleled reliability, operation, cleanliness and set a benchmark for low vibration levels and are ideal for many semiconductor, surface science or high energy physics industries. Being DC powered, they utilize a half rack controller that includes autotuning and advanced diagnostic features.

The range includes pumps with speeds from 300 l/s to 1000 l/s and <10-10 mbar ultimate pressure (CF flange). A “C” version for harsh process is available as well.

Ultra-High Vacuum Low Vibration Series

Incorporating all the features from the Ultra High Vacuum series, this range has a built-in vibration isolator as well that gives an ultra-low vibration operation. Select the right controller to partner with your STP Maglev Turbo Pump by selecting from of our range of SCU control Units.

SCU-350 Control Unit

The SCU-350 is ideal for small sized turbo pumps and is EU-RoHS compliant. It has an enhanced vibration property at a lower frequency range and is fully-compatible with the current control unit models. There is a reduction in electric capacity and tool power consumption owing to the fact that it had lower input voltage. The SCU-350 is provided with enhanced noise immunity with universal voltage function for operation with supply voltage from 100-240 VAC without switching.

SCU-800 Control Unit

The SCU800 is ideal for middle sized pumps and is a also fully digital. There is an additional reduction in vibration due to the new Auto Vibration Reduction technology and advanced notice of information on maintenance time is provided with the advanced pre-maintenance call function.

SCU-XL800 Control Unit

Most suited for the pumps ranging from 600 l/s to 1300 l/s, the SCU-XL800 is fully digital and eliminates vibrations of less than 300 Hz which are difficult to eliminate even with mechanical vibration isolators. The Digital Sign Processor techniques shows that the SCU-XL800 achieves a sub-nanometer vibration level across its frequency spectrum which makes it most suitable for electron microscopy, metrology and lithography systems where low-vibration is essential.

SCU-1600 Control Unit

The SCU-1600 controller is compatible with pump speeds ranging from 2000 l/s to 4500 l/s. They are highly reliable, provide better communication and pump compatibility with reduction in back-up unit requirements, ultimately reducing overall cost of ownership.

T-Station 75 Turbomolecular Pumping Stations

United with the EXT75DX turbopump, the T-Station 75 turbomolecular pumping station produces pumping speeds of 42 l/s – 61 l/s with a dry pump or oil sealed pump and a simple controller.

A perfect product for general laboratory requirements, the T-station 75 is designed with a Turbo and Active Gauge controller which provides the ability to control the active gauges*, vent valve*, aids a delayed start of turbopump to time or pressure if a gauge is fixed, and most importantly a distinct start/stop button for the system.

Compact: Reduced footprint
Fully Assembled: No Systemisation needed
Robust Construction: Reasonable Cost of Ownership
Separate purchase of Gauges and TAV5 vent valve must be made.
The E2M1.5 or XDD1 high capacity backing pumps gives an alternative to either choose and completely dry diaphragm pump or an oil sealed pump
In-built air cooler reduces the noise in the operation by replacing multiple fans, and also cools the internal power supply
New custom TAG (Turbo and Active Gauge) controller features:
For ease in automated performance, there is a distinct button to start/stop the pump on command
Display is easy to read as the turbo speed is shown in percentage
There is zero extra cost for the display of gauge due to the capacity to control a single active gauge including AIM, ASG, APG100, or WRD and selection of units
For large systems, it facilitates an automatic start-up due to a delayed turbo start to either time, or where gauge is fixed to pressure
No user involvement is necessary to fit the TAV5 vent valve due to the option to select vent mode for automatic venting
According to the application requirement for the user, this is readily available with an NW40, ISO63 or CF63 inlet flange.
Optimum flexibility due to the ability of plugging the TAV5 vent valve directly into DX module and controller and enabling selectio of three modes :
Controlled vent, from 100% then hard vent at 50% speed
Hard vent at 50% speed
Fan (Ideal for application where either venting is not required or with an air cooler for remote pump mounting while constantly providing power to the socket)

Turbo Pumping Stations

An all-inclusive solution to all vacuum needs, the Edwards range of nEXT turbomolecular pumping stations are designed with state-of-the-art technology for easy installation and performance.

These pumping stations are combined with the TIC turbo and instrument controller for providing an automated start/stop function and an ease in integration with Edwards Active Gauges.

Designed to Your Needs: Wide variety of choices of turbomolecular and backing pumps
Fully Assembled: No systemisation necessary
Simple Operation: Smart and easy to use controls with serial communications

While we believe in specialisation according to needs of the our customers, we generally offer our EXT75DX pump for pumping speeds from 42 l/s to 66 l/s. Extra flexibility in user serviceability along with an option to back the pump plus a turbo and instrument TIC200 is offered for pumping speeds of 240l/s to 400l/s. An industry standard of an oil sealed pump generally comes with an EMF mist filter fitted in it and for the nXDS dry scroll pump, the industry standard generally comes with an isolation valve fitted between the backing pump and turbo pump.

Accelerators
Analysis and surface physics
Beam lines
Electron beam welding
Load locks
High energy physics
Research & development
Surface science
UHV systems

Turbo Pumps

At Edwards, it is our priority to deliver unparalleled vacuum pump performances for the most challenging application. This is why we have designed the nEXT technology to provide an entirely new experience in the industry of turbo pumps and increase performance.

The nEXT rotor eliminates the conventional concept of only delivering either high speed or high compression. Instead, the blade arrangements in the rotors are completely upgraded to maximise both speed, and compression.

And the final result being a phenomenal benchmark for any pump of its size.

Pump Ranges:

EXT75DX
nEXT 240 D or T
nEXT 300 D or T
nEXT 400 D or T

We have the right pump for you, whether it’s a low priced oil-sealed pump, or a completely dry system. We cater to meet your needs with our extensive range of backing pumps for the turbo pumping stations. So ask, and you will receive!

Why Choose an Edwards nXDS DRY Scroll Pump?

For a oil free, resilient, trustable vacuum solution, we recommend you to change your vacuum experience to the new nXDS dry scroll pump.

Silent operation | Better work environment and low environmental impact
Smart and easy to use controls | Simple operation
Hermetically sealed for a lubricant free vacuum environment | No contamination and no oil to dispose
Long service interval and low power Consumption | Minimal cost of ownership
Better vapour handling | Faster process

Why Choose an Edwards RV OIL-SEALED Pump?

The Edwards RV series have set an industry benchmark and have sold over a striking 150,000 units. This has been achieved due to our field proven deisgn and reliability in an extensive range of applications and environments.
High vapour handling | Faster process
Better particulate handling | More reliabile
Fast acting, automatic inlet valve for best in class anti-suck back protection | Safe process and systems
Mode selector and two position gas ballast | Designed to meet your vacuum needs
Developed for easy maintenance | No unplanned downtime
Silent running | Better work environment

Pump Ranges: