e-Vap 3kW Miniature Source

• Compact design
• Water cooled
• 2cc fixed pocket

Fits onto a 2.75″ CF flange

e-Vap 3kW Mighty Source

• Compact design
• Uniquely small footprint
• 2cc x 4-pocket configuration

Water cooled

e-Vap 10kW Large Fixed Pocket Source

• Modular design
• Water cooled

7 to 100cc Fixed pocket

e-Vap 10kW Large Rotary Pocket Source

• Modular design
• Water cooled
• 7 to 30cc x 4-pocket configuration
• 7 to 12cc x 6-pocket configuration

150cc carousel pocket

e-Vap XL Rotary Pocket Source

• Water cooled
• 100cc x 3 pocket configuration
• 40 to 75cc x 4 pocket configuration
• 25 to 40cc x 6 pocket configuration

400cc carousel pocket

e-Vap Custom Flange Mount Assemblies

• Custom specified flange sizes
• Vertical & horizontal configurations
• Integrated electrical, water, and motion feedthroughs

Shutter options available

UHV Linear Source

• 7 to 40cc x 4 pocket
• No in vacuum bearings

Bakeable to 220°C

Electron Beam Gun & Power Supply

Electron Beam Gun & Power Supply