DC & RF Power Supplies for MAK Sputter Sources

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e-Vap® CVS power supplies are the perfect solution for modern coating systems. The digital control system allows user control of power level and arc management. MeiVac offers 3 standard power configurations; 3kW, 6kW and 12kW. These can be programmed to match any electron beam source to perfection. Power supplies come with both Ethernet and a 50 pin digital I/O with access to all key control and monitoring features. A standard graphic user interface (GUI) is also included. All CVS supplies include our 1U filament drive unit, remote mount filament transformer and complete installation / cable kit. Multi-channel kits are also available to control up to 3 ebeam sources per power supply.
MAXIM 500W DC Power Supplies for Magnetron Sputtering
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MAXIM 1000W DC Power Supplies for Magnetron Sputtering
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MAXIM 1500W DC Power Supply for Magnetron Sputtering
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R301 – 13.56MHz – 300W RF Generator and Matching Network Package
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R601 – 13.56MHz – 600W RF Generator and Matching Network Package
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