Vendor: SAWATEC AG

Developer SMD-200 / SMD-200-E

Name: Developer SMD-200 / SMD-200-E
Brand: SAWATEC AG
Availability: InStock

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Categories: Lithography

Description
Reviews

Developer SMD-200 / SMD-200-E

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Cleaning, developing or etching with high process performance

There are two different developer versions. The SMD-200 handles cleaning and development. The SMD-200-E handles etching in addition to cleaning and development. Both instruments are designed to process wafers up to 8“ (200 mm) or substrates up to 6 x 6“ (150 x 150 mm). The process chamber operates up to Ø 212 mm.

The SMD developers by SAWATEC are convincing due to their high process performance, low chemical consumption as well as reliable repeatability, even with thick photoresist layers. Due to the user-friendly operation and easy cleaning, these instruments are preferentially used in laboratories, R & D and small-scale production. The high-precision instruments are available both as mobile cabinet and bench-mounted unit.