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Categories: Lithography, Sawatec Components, Spin Chucks
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Spin Chuck Set
Based on commonly used spin chuck sizes SAWATEC created a Spin Chuck Set, which contains different spin chuck sizes starting from specimen 8“, 1“, 2“, 4“, and 6“ vacuum chucks.
Based on commonly used spin chuck sizes SAWATEC created a Spin Chuck Set, which contains different spin chuck sizes starting from specimen 8“, 1“, 2“, 4“, and 6“ vacuum chucks.
The chuck holder is an integrated part of the Spin Module SM-150. The Spin Chuck Set is designed for our Spin Module SM-150 but can principally also be used for larger instruments.
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