Vendor: SAWATEC AG

Spin Module SM-150

Name: Spin Module SM-150
Brand: SAWATEC AG
Availability: InStock

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Categories: Lithography

Description
Reviews

Spin Module SM-150

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Ideal for manual coatings

The Spin Modules SM-150 are the optimal choice for manual coating of thin layers. They are used for substrates with no or very low surface structures. All commercial photoresists and coating materials can be coated homogeneously on wafers up to 150 mm (6 inches) or 127 x 127mm (5x5 inches) substrates. The process chamber is designed for a diameter of up to 176 mm.

The high-precision, good value instruments are available both as portable bench-top and bench mounted unit.