Vendor: SAWATEC AG

Spin Rinser Dryer SRD-150-4S

Name: Spin Rinser Dryer SRD-150-4S
Brand: SAWATEC AG
Availability: InStock

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Categories: Lithography, Sawatec Instruments, Spin Rinser Dryer

Description
Reviews

Spin Rinser Dryer SRD-150-4S
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Excellent process quality coupled with high productivity

The Spin Rinser Dryer SRD-150-4S is easy to operate and to handle. With this cooling and drying centrifuge, wafers or substrates can be cleaned following wet-chemical processes and dried efficiently with the aid of centrifugal force and heated nitrogen.

The process chamber respectively the cassette rotor is designed for a substrate diameter of 150mm, with a maximum load capacity of 4 wafer cassettes, each containing 25 wafers. The innovative cassette holder makes it easy to change three different cassette sizes without any tools.

These instruments are available as mobile cabinet unit and as an integral part of wet-chemical systems.